Physics – Condensed Matter – Mesoscale and Nanoscale Physics
Scientific paper
2009-08-26
Applied Physics Letters 95, 172105 (2009)
Physics
Condensed Matter
Mesoscale and Nanoscale Physics
2 new references added
Scientific paper
Epitaxial graphene films were formed on the Si-face of semi-insulating 4H-SiC substrates by a high temperature sublimation process. A high-k gate stack on epitaxial graphene is realized by inserting a fully oxidized nanometer thin aluminum film as a seeding layer followed by an atomic-layer deposition process. The electrical properties of epitaxial graphene films are sustained after gate stack formation without significant degradation. At low temperatures, the quantum-Hall effect in Hall resistance is observed along with pronounced Shubnikov-de Hass oscillations in diagonal magneto-resistance of gated epitaxial graphene on SiC (0001).
Bolen Michael L.
Capano Michael A.
Engel Lloyd W.
Gu Jianzhong
Shen Tongye
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