Computer Science – Performance
Scientific paper
Nov 2000
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2000spie.4146...60l&link_type=abstract
Proc. SPIE Vol. 4146, p. 60-63, Soft X-Ray and EUV Imaging Systems, Winfried M. Kaiser; Richard H. Stulen; Eds.
Computer Science
Performance
3
Scientific paper
High performance reflective coatings for EUVL projection systems can be produced by using e-beam evaporation in combination with ion beam smoothening of the interfaces. Using this technique, we recently demonstrated a near normal incidence reflectivity of 69.5%. Another, equally important part of the optimization of the coating process is the lateral control of the thickness of the layers, that is the d-spacing of the coating. In this paper we demonstrate the ability to obtain a uniformity of the d-spacing of the coating of better than +/- 0.05% over a 6' area, both on flat and concave surfaces (uniformity specified in terms of wavelength of maximum reflectance). All reflectance measurements have been carried out at the PTB facilities at the electron storage rings BESSY I and BESSY II in Berlin.
Bijkerk Fred
Goerts Peter C.
Haidl Markus
Kessels M. J.
Louis Eric
No associations
LandOfFree
Mo/Si multilayer coating technology for EUVL: coating uniformity and time stability does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.
If you have personal experience with Mo/Si multilayer coating technology for EUVL: coating uniformity and time stability, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Mo/Si multilayer coating technology for EUVL: coating uniformity and time stability will most certainly appreciate the feedback.
Profile ID: LFWR-SCP-O-1116516