Fabrication of submicron La$_{2-x}$Sr$_{x}$CuO$_{4}$ intrinsic Josephson junction stacks

Details Fabrication of submicron La$_{2-x}$Sr$_{x}$CuO$_{4}$ intrinsic Josephson junction stacks Fabrication of submicron La$_{2-x}$Sr$_{x}$CuO$_{4}$ intrinsic Josephson junction stacks

2011-08-17

arxiv.org/abs/1108.3469v1

Journal of Applied Physics 109, 033912 (2011)

Physics

Condensed Matter

Superconductivity

5 pages, 6 figures

Scientific paper

10.1063/1.3544037

Intrinsic Josephson junction (IJJ) stacks of cuprate superconductors have potential to be implemented as intrinsic phase qubits working at relatively high temperatures. We report success in fabricating submicron La$_{2-x}$Sr$_{x}$CuO$_{4}$ (LSCO) IJJ stacks carved out of single crystals. We also show a new fabrication method in which argon ion etching is performed after focused ion beam etching. As a result, we obtained an LSCO IJJ stack in which resistive multi-branches appeared. It may be possible to control the number of stacked IJJs with an accuracy of a single IJJ by developing this method.

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