Physics – Condensed Matter – Materials Science
Scientific paper
2011-06-03
Inst. Phys. Conf. Ser. 149 (1996) 361-366
Physics
Condensed Matter
Materials Science
DRIP-VI, 1995
Scientific paper
This paper presents a new technique of optical beam-induced scattering of mid-IR-laser radiation, which is a special mode of the recently developed scanning mid-IR-laser microscopy. The technique in its present form is designed for investigation of large-scale recombination-active defects in near-surface and near-interface regions of semiconductor wafers. However, it can be easily modified for the defect investigations in the crystal bulk. Being in many respects analogous to EBIC, the present technique has some indisputable advantages, which enable its application for both non-destructive laboratory investigations and quality monitoring in the industry.
Astafiev O. V.
Kalinushkin V. P.
Yuryev Vladimir A.
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