Electrically Tunable Collective Modes in a MEMS Resonator Array

Details Electrically Tunable Collective Modes in a MEMS Resonator Array Electrically Tunable Collective Modes in a MEMS Resonator Array

2000-08-15

arxiv.org/abs/cond-mat/0008211v1

Physics

Condensed Matter

Mesoscale and Nanoscale Physics

RevTec, 12 pages + 5 figures

Scientific paper

Using optical diffraction, we study the mechanical vibrations of an array of micromechanical resonators. Implementing tunable electrostatic coupling between the suspended, doubly-clamped Au beams leads to the formation of a band of collective vibrational modes within these devices. The evolution of these modes with coupling strength is clearly manifested in the optical diffraction pattern of light transmitted through the array. The experimental results are analyzed using a simple model for one-dimensional phonons. These structures offer unique prospects for spectral analysis of complex mechanical stimuli.

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