Physics – Condensed Matter – Mesoscale and Nanoscale Physics
Scientific paper
2001-11-30
APL Vol. 80, No. 15, pp.2776-2778 (2002)
Physics
Condensed Matter
Mesoscale and Nanoscale Physics
4 pages, 4 figures
Scientific paper
10.1063/1.1465526
Deep submicron Al-AlOx-Nb tunnel junctions and single electron transistors with niobium islands were fabricated by electron beam gun shadow evaporation. Using stencil masks consisting of the thermostable polymer polyethersulfone (PES) and germanium, high quality niobium patterns with good superconducting properties and a gap energy of up to 2Delta = 2.5 meV for the niobium were achieved. The I(U) characteristics of the transistors show special features due to tunneling of single Cooper pairs and significant gate modulation in both the superconducting and the normal state.
Dolata Ralf
Niemeyer Jens
Scherer Hansjoerg
Zorin Alexander B.
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