Lithography-free Fabrication of High Quality Substrate-supported and Freestanding Graphene devices

Physics – Condensed Matter – Mesoscale and Nanoscale Physics

Scientific paper

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Scientific paper

10.1007/s12274-010-1013-5

We present a lithography-free technique for fabrication of clean, high quality graphene devices. This technique is based on evaporation through hard Si shadow masks, and eliminates contaminants introduced by lithographical processes. We demonstrate that devices fabricated by this technique have significantly higher mobility values than those by standard electron beam lithography. To obtain ultra-high mobility devices, we extend this technique to fabricate suspended graphene samples with mobility as high as 120,000 cm^2/Vs.

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