Physics – Condensed Matter – Mesoscale and Nanoscale Physics
Scientific paper
2010-03-23
Nano Research, 3, 98 (2010)
Physics
Condensed Matter
Mesoscale and Nanoscale Physics
Scientific paper
10.1007/s12274-010-1013-5
We present a lithography-free technique for fabrication of clean, high quality graphene devices. This technique is based on evaporation through hard Si shadow masks, and eliminates contaminants introduced by lithographical processes. We demonstrate that devices fabricated by this technique have significantly higher mobility values than those by standard electron beam lithography. To obtain ultra-high mobility devices, we extend this technique to fabricate suspended graphene samples with mobility as high as 120,000 cm^2/Vs.
Bao Wei
Deshpande Akshay
Lau* Chun Ning
LeRoy Brian J.
Liu Gaisheng
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