Physics – Condensed Matter – Materials Science
Scientific paper
2004-10-17
Physics
Condensed Matter
Materials Science
12 pages, 7 figures, regular paper submitted to Nanotechnology
Scientific paper
10.1088/0957-4484/16/4/039
We report on a nanoscale patterning method on Si substrates using self-assembled metal islands and low-energy ion-beam irradiation. The Si nanostructures produced on the Si substrate have a one-to-one correspondence with the self-assembled metal (Ag, Au, Pt) nanoislands initially grown on the substrate. The surface morphology and the structure of the irradiated surface were studied by high-resolution transmission electron microscopy (HRTEM). TEM images of ion-beam irradiated samples show the formation of sawtooth-like structures on Si. Removing metal islands and the ion-beam induced amorphous Si by etching, we obtain a crystalline nanostructure of Si. The smallest structures emit red light when exposed to a UV light. The size of the nanostructures on Si is governed by the size of the self-assembled metal nanoparticles grown on the substrate for this replica nanopatterning. The method can easily be extended for tuning the size of the Si nanostructures by the proper choice of the metal nanoparticles and the ion energy in ion-irradiation. It is suggested that off-normal irradiation can also be used for tuning the size of the nanostructures.
Dev B. N.
Satpati Biswarup
No associations
LandOfFree
Replicating Nanostructures on Silicon by Low Energy Ion Beams does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.
If you have personal experience with Replicating Nanostructures on Silicon by Low Energy Ion Beams, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Replicating Nanostructures on Silicon by Low Energy Ion Beams will most certainly appreciate the feedback.
Profile ID: LFWR-SCP-O-558043