Conformal oxide coating of Carbon Nanotubes

Details Conformal oxide coating of Carbon Nanotubes Conformal oxide coating of Carbon Nanotubes

2007-06-20

arxiv.org/abs/0706.2998v1

Physics

Condensed Matter

Materials Science

4 pages, 3 figures

Scientific paper

10.1063/1.2841710

The International Roadmap for Ferroelectric Memories requires
three-dimensional integration of high-dielectric materials onto metal
interconnects or bottom electrodes by 2010. We report the first integration of
high-dielectric oxide films onto carbon nanotube electrodes with an aim of
ultra-high integration density of FeRAMs (Tb/in2).

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