Integrated high frequency aluminum nitride optomechanical resonators

Details Integrated high frequency aluminum nitride optomechanical resonators Integrated high frequency aluminum nitride optomechanical resonators

2012-04-18

arxiv.org/abs/1204.4203v2

Physics

Condensed Matter

Mesoscale and Nanoscale Physics

Scientific paper

Aluminum nitride (AlN) has been widely used in microeletromechanical resonators for its excellent electromechanical properties. Here we demonstrate the use of AlN as an optomechanical material that simultaneously offer low optical and mechanical loss. Integrated AlN microring resonators in the shape of suspended rings exhibit high optical quality factor (Q) with loaded Q up to 125,000. Optomechanical transduction of the Brownian motion of a GHz contour mode yields a displacement sensitivity of 6.2\times10^(-18)m/Hz^(1/2) in ambient air.

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