The effect of p-type doping on the oxidation of H-Si(111) studied by second-harmonic generation

Physics – Condensed Matter – Materials Science

Scientific paper

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Scientific paper

Atomic force microscopy and second-harmonic generation data show that boron
doping enhances the rate of oxidation of H-terminated silicon. Holes cause a
greater increase in the reactivity of the Si-H up bonds than that of the Si-Si
back bonds.

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