Physics
Scientific paper
Mar 1986
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1986jap....59.1759p&link_type=abstract
Journal of Applied Physics (ISSN 0021-8979), vol. 59, March 1, 1986, p. 1759-1761.
Physics
6
Collisionless Plasmas, Electron Oscillations, Mercury Vapor, Radio Frequency Discharge, Direct Current, Electric Fields
Scientific paper
It was experimentally shown that in radio-frequency (RF) discharge plasmas excited in mercury vapor at pressures below 0.01 Torr, the electron oscillation velocity and the active component of the RF electric field are substantially smaller than those in direct current (dc) discharges. Results obtained were explained by effects of a noncollisional dissipative process occurring at the oscillating boundaries between RF plasma and RF electrode sheaths.
Godyak V. A.
Popov O. A.
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