Portable diagnostics for EUV light sources

Details Portable diagnostics for EUV light sources Portable diagnostics for EUV light sources

Nov 2000

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2000spie.4146..121s&link_type=abstract

Proc. SPIE Vol. 4146, p. 121-127, Soft X-Ray and EUV Imaging Systems, Winfried M. Kaiser; Richard H. Stulen; Eds.

Physics

9

Scientific paper

The EUV light source is a critical factor for the success of Extreme Ultraviolet Lithography (EULV), ASML, FOM and Philips Research have developed a portable set of diagnostics for the characterization of candidate EUV sources, called Flying Circus. The set of diagnostics is used to perform the following measurements: Absolute EUV power measurements, pulse-to-pulse intensity fluctuations, plasma size and shape, size/shape/positional stability, spectral distribution of radiation and stability, timing jitter and contamination by the source. These measurements are to be performed on-site, at the laboratories of the different source developers. The design as well as the first calibration measurements performed by the Flying Circus on the FOM Xe double gas jet source and on the PLEX z-pinch source will be discussed.

Affiliated with

Also associated with

No associations

Rating

Portable diagnostics for EUV light sources does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Portable diagnostics for EUV light sources, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Portable diagnostics for EUV light sources will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-1116623