Relaxation and derelaxation of pure and hydrogenated amorphous silicon during thermal annealing experiments

Physics – Condensed Matter – Materials Science

Scientific paper

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15 pages, 3 figures, 1 table to be published in Applied Physics Letters

Scientific paper

10.1063/1.3464961

The structural relaxation of pure amorphous silicon (a-Si) and hydrogenated amorphous silicon (a-Si:H) materials, that occurs during thermal annealing experiments, has been analysed by Raman spectroscopy and differential scanning calorimetry. Unlike a-Si, the heat evolved from a-Si:H cannot be explained by relaxation of the Si-Si network strain, but it reveals a derelaxation of the bond angle strain. Since the state of relaxation after annealing is very similar for pure and hydrogenated materials, our results give strong experimental support to the predicted configurational gap between a-Si and crystalline silicon.

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