Physics – Condensed Matter – Materials Science
Scientific paper
2011-07-26
Acta Physica Polonica A 116 (2009) 921-923
Physics
Condensed Matter
Materials Science
4 pages, 3 figures, 6 references
Scientific paper
We report on the structural, electrical and magnetic properties of ZnCoO thin films grown by Atomic Layer Deposition (ALD) method using reactive organic precursors of zinc and cobalt. As a zinc precursor we applied either dimethylzinc or diethylzinc and cobalt (II) acetyloacetonate as a cobalt precursor. The use of these precursors allowed us the significant reduction of a growth temperature to 300oC and below, which proved to be very important for the growth of uniform films of ZnCoO. Structural, electrical and magnetic properties of the obtained ZnCoO layers will be discussed based on the results of SIMS, SEM, EDS, XRD, AFM, Hall effect and SQUID investigations.
Godlewski Marek
Guziewicz Elzbieta
Jakiela Rafal
Kowalik I. A.
Kowalski B. J.
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