X-ray/EUV multilayers - Promise and pitfalls

Details X-ray/EUV multilayers - Promise and pitfalls X-ray/EUV multilayers - Promise and pitfalls

Jul 1989

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1989spie.1160..209h&link_type=abstract

IN: X-ray/EUV optics for astronomy and microscopy; Proceedings of the Meeting, San Diego, CA, Aug. 7-11, 1989 (A90-46006 21-74).

Physics

Optics

1

Extreme Ultraviolet Radiation, Image Enhancement, Laminates, Point Spread Functions, Reflectance, X Ray Telescopes, Distribution Functions, Grazing Incidence, Optical Filters, Spatial Resolution, X Ray Scattering

Scientific paper

Results are presented on recent developments in X-ray/EUV multilayers, illustrating the advantages of multilayers as compared to conventional optics, and the potential limitations of multilayers. The results of performance predictions show that the X-ray multilayers are capable of subarcsec resolution, provided that sufficiently smooth multilayer interfaces are maintained. However, results of an image quality analysis showed that image degradation occurs in a rather nonintuitive manner with varying interface PSD slope.

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