Physics – Condensed Matter
Scientific paper
1993-11-26
Physics
Condensed Matter
7 pages, LaTeX 2.09. Figures not included, but available by fax. Send email to chaiken@csmgee.llnl.gov
Scientific paper
B and N K-edge x-ray absorption spectroscopy measurements have been performed on three BN thin films grown on Si substrates using ion-assisted pulsed laser deposition. Comparison of the films' spectra to those of several single-phase BN powder standards shows that the films consist primarily of $sp^2$ bonds. Other features in the films' spectra suggest the presence of secondary phases, possibly cubic or rhombohedral BN. Films grown at higher deposition rates and higher ion-beam voltages are found to be more disordered, in agreement with previous work.
Chaiken Andrew
Doll G. L.
Sato Takeshi
Terminello L. J.
Wong Jared
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