Variation of the metallic content of Focused Electron Beam Induced Deposition of Cobalt

Details Variation of the metallic content of Focused Electron Beam Induced Deposition of Cobalt Variation of the metallic content of Focused Electron Beam Induced Deposition of Cobalt

2010-02-10

arxiv.org/abs/1002.2156v1

Angewandte Chemie International Edition 49 (2010) 8880-8884

Physics

Condensed Matter

Materials Science

6 pages, 7 figures

Scientific paper

10.1002/anie.201004220

Cobalt-containing deposits from Cobalt carbonyl are experimentally produced
and their composition is measured. The Cobalt concentration is found to be
readily tunable between 20 and 70 at.% by variation of the dwell time. The
variations in metallic concentration are explained by co-deposition of
hydrocarbons present in the chamber background pressure.

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