Physics – Plasma Physics
Scientific paper
2011-04-28
Physics
Plasma Physics
submitted to Plasma Chemisty and Plasma Processing International Symposium on Plasma Chemistry 20, Philadelphia, Invited paper
Scientific paper
Microplasmas are operated around atmospheric pressure exhibiting pronounced non-equilibrium characteristics, i.e. they possess energetic electrons while ions and neutrals remain cold. They have gained significant interest due to their enormous application potential e.g. in the biomedical, surface modification and light source areas, just to name a few. Many different configurations are in use. Their understanding and quantification is mandatory for further progress in applications. We report on recent progress in the diagnostics and simulation of the entire microplasma system from gas introduction, via the plasma discharge up to the samples at the example of a plasma jet operated in He/O2 in an ambient air environment.
Benedikt Jan
Böke M.
der Gathen Volker Schulz-von
Ellerweg Dirk
Hemke Torben
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