Physics – Plasma Physics
Scientist
Physics
Plasma Physics
Scientist
Institute for Experimental Physics II: Reactive Plasmas, Ruhr-Universität Bochum, 44780 Bochum, Germany
Characterization of the effluent of a He/O2 microscale atmospheric pressure plasma jet by quantitative molecular beam mass spectrometry
Deposition of SiOx films by means of atmospheric pressure microplasma jets
Diagnostics of low and atmospheric pressure plasmas by means of mass spectrometry
The mystery of O and O3 production in the effluent of a He/O2 atmospheric pressure microplasma jet
The role of oxygen and surface reactions in the deposition of silicon oxide like films from HMDSO at atmospheric pressure
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