Ultrasensitive nanoelectromechanical mass detection

Physics – Condensed Matter – Other Condensed Matter

Scientific paper

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Submitted to Appl. Phys. Lett. on December 22, 2003

Scientific paper

10.1063/1.1755417

We describe the application of nanoelectromechanical systems (NEMS) to ultrasensitive mass detection. In these experiments, a modulated flux of atoms was adsorbed upon the surface of a 32.8 MHz NEMS resonator within an ultrahigh vacuum environment. The mass-induced resonance frequency shifts by these adsorbates were then measured to ascertain a mass sensitivity of 2.53x10^-18 g. In these initial measurements, this sensitivity is limited by the noise in the NEMS displacement transducer; the ultimate, limits of the technique are set by fundamental phase noise processes. Our results and analysis indicate that mass sensing of individual molecules will be realizable with optimized NEMS devices.

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