Physics – Condensed Matter – Other Condensed Matter
Scientific paper
2004-02-20
Physics
Condensed Matter
Other Condensed Matter
Submitted to Appl. Phys. Lett. on December 22, 2003
Scientific paper
10.1063/1.1755417
We describe the application of nanoelectromechanical systems (NEMS) to ultrasensitive mass detection. In these experiments, a modulated flux of atoms was adsorbed upon the surface of a 32.8 MHz NEMS resonator within an ultrahigh vacuum environment. The mass-induced resonance frequency shifts by these adsorbates were then measured to ascertain a mass sensitivity of 2.53x10^-18 g. In these initial measurements, this sensitivity is limited by the noise in the NEMS displacement transducer; the ultimate, limits of the technique are set by fundamental phase noise processes. Our results and analysis indicate that mass sensing of individual molecules will be realizable with optimized NEMS devices.
Ekinci Kamil L.
Huang X. M. H.
Roukes Michael L.
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