Ultrafast phase transitions of a laser-modified silicon surface

Physics – Condensed Matter – Mesoscale and Nanoscale Physics

Scientific paper

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Scientific paper

To investigate ultrashort pulsed laser induced surface modification, conditions that result in a superheated melted liquid layer and material evaporation are considered. To describe the surface modification occurring after cooling and resolification of the melted layer, a hybrid theoretical model is presented that is based on the approximating Boltzmann transport equations coupled to a set of hydrodynamics equations. The proposed theoretical framework aims to address the laser-material interaction at the onset of evaporation and thus minimal mass removal in combination with a hydrodynamics-based scenario of the crater creation and ripple formation following surface irradiation with single and multiple pulses, respectively. Details of the surface morphology attained are elaborated as a function of the imposed conditions and results are tested against experimental data which suggests a good agreement of the theoretical model with experimental observations.

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