Titanium Nitride Films for Ultrasensitive Microresonator Detectors

Details Titanium Nitride Films for Ultrasensitive Microresonator Detectors Titanium Nitride Films for Ultrasensitive Microresonator Detectors

2010-03-29

arxiv.org/abs/1003.5584v2

Physics

Condensed Matter

Superconductivity

to be published in APL

Scientific paper

Titanium nitride (TiNx) films are ideal for use in superconducting microresonator detectors because: a) the critical temperature varies with composition (0 < Tc < 5 K); b) the normal-state resistivity is large, \rho_n ~ 100 $\mu$Ohm cm, facilitating efficient photon absorption and providing a large kinetic inductance and detector responsivity; and c) TiN films are very hard and mechanically robust. Resonators using reactively sputtered TiN films show remarkably low loss (Q_i > 10^7) and have noise properties similar to resonators made using other materials, while the quasiparticle lifetimes are reasonably long, 10-200 $\mu$s. TiN microresonators should therefore reach sensitivities well below 10^-19 WHz^(-1/2).

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