Physics – Condensed Matter – Materials Science
Scientific paper
2005-01-11
Physics
Condensed Matter
Materials Science
PDF, 9 pages with 1 figures
Scientific paper
The simulation scheme for heterostructural growth of compound semiconductors is presented based on the kinetic Monte Carlo method. The sheme is designed as simple as possible in order to apply it for any heteroepitaxial growth on GaAs(001) substrate. The parameters used in the simulation are determined with the first-principles calculation to reproduce experimental RHEED intensity curves for homoepitaxial growth of GaAs(001).
Ishii Akira
Oshima Shunsuke
Toda Natsue
Tsukao Masatoshi
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