Temperature Dependence On The Emission Characteristics Of A AuGe Liquid Metal Alloy Ion Source

Details Temperature Dependence On The Emission Characteristics Of A AuGe Liquid Metal Alloy Ion Source Temperature Dependence On The Emission Characteristics Of A AuGe Liquid Metal Alloy Ion Source

Apr 2007

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2007aipc..899..423g&link_type=abstract

SIXTH INTERNATIONAL CONFERENCE OF THE BALKAN PHYSICAL UNION. AIP Conference Proceedings, Volume 899, pp. 423-424 (2007).

Physics

Charged-Particle Beam Sources And Detectors, Liquid Metals And Alloys

Scientific paper

Focused ion beam systems employing liquid metal ion sources have become of increasing importance in the microelectronics industry. Maskless ion implantation as a modern patterning technique is one of the most attractive application of Focused Ion Beams. In spite of the fact that a great deal of research has been carried out on liquid metal ion sources, surprisingly few results exist on the temperature dependence of their emission characteristics. In this article we study a AuGe liquid metal alloy ion source. The unusual results are explained in terms of the abnormal behavior of the surface tension of the alloy with temperature.

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