Tailoring strain in SrTiO3 compound by low energy He+ irradiation

Details Tailoring strain in SrTiO3 compound by low energy He+ irradiation Tailoring strain in SrTiO3 compound by low energy He+ irradiation

2010-10-29

arxiv.org/abs/1010.6152v1

Physics

Condensed Matter

Materials Science

11 pages, 4 figures, Accepted for publication in Europhysics Letter (http://iopscience.iop.org/0295-5075)

Scientific paper

The ability to generate a change of the lattice parameter in a near-surface layer of a controllable thickness by ion implantation of strontium titanate is reported here using low energy He+ ions. The induced strain follows a distribution within a typical near-surface layer of 200 nm as obtained from structural analysis. Due to clamping effect from the underlying layer, only perpendicular expansion is observed. Maximum distortions up to 5-7% are obtained with no evidence of amorphisation at fluences of 1E16 He+ ions/cm2 and ion energies in the range 10-30 keV.

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