Synthesis of Large-Area MoS2 Atomic Layers with Chemical Vapor Deposition

Details Synthesis of Large-Area MoS2 Atomic Layers with Chemical Vapor Deposition Synthesis of Large-Area MoS2 Atomic Layers with Chemical Vapor Deposition

2012-02-24

arxiv.org/abs/1202.5458v1

Physics

Condensed Matter

Materials Science

First submitted on 12-Dec-2011. Accepted in Adv. Mater

Scientific paper

10.1002/adma.201104798

Large-area MoS2 atomic layers are synthesized on SiO2 substrates by chemical
vapor deposition using MoO3 and S powders as the reactants. Optical,
microscopic and electrical measurements suggest that the synthetic process
leads to the growth of MoS2 monolayer. The TEM images verify that the
synthesized MoS2 sheets are highly crystalline.

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