SWNT-array resonant MOS transistor

Details SWNT-array resonant MOS transistor SWNT-array resonant MOS transistor

2010-08-27

arxiv.org/abs/1008.4718v1

Physics

Condensed Matter

Mesoscale and Nanoscale Physics

11 pages, 4 figures, supplementary information file can be provided by e-mail (mailto: marcelo.goffman@cea.fr)

Scientific paper

We show that thin horizontal arrays of single wall carbon nanotubes (SWNTs) suspended above the channel of silicon MOSFETs can be used as vibrating gate electrodes. This new class of nano-electromechanical system (NEMS) combines the unique mechanical and electronic properties of SWNTs with an integrated siliconbased motion detection. Its electrical response exhibits a clear signature of the mechanical resonance of SWNTs arrays (120-150 MHz) showing that these thin horizontal arrays behave as a cohesive, rigid and elastic body membrane with a Young modulus in the order of 1-10 GPa and ultra-low mass. The resonant frequency can be tuned by the gate voltage and its dependence is well understood within the continuum mechanics framework.

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