Physics – Optics
Scientific paper
Jul 1996
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1996spie.2805...90g&link_type=abstract
Proc. SPIE Vol. 2805, p. 90-107, Multilayer and Grazing Incidence X-Ray/EUV Optics III, Richard B. Hoover; Arthur B. Walker; Eds
Physics
Optics
1
Scientific paper
In a previous paper, we described the experimental set-up and requirements used to study an XMM mandrel by x-ray angle-resolved scattering (ARS). We presented first results and compared them to micro-profilometry data. Here we complete the description of the experimental method and the data analysis of the x-ray ARS studies. We point out several pitfalls and propose solutions to avoid them. We emphasize the need to span a wide intensity dynamical range and the importance to separate the intensities form the specular and the scattered beams. This separation is of particular interest for estimating the rms-roughness from the power spectral density, modeled by a power-law of the spatial frequency. We then compare the results for the roughness with those obtained from profiler measurements. In a second part, the figure measurements of the XMM mandrel are described and analyzed in detail. They have been carried out with both an x-ray pencil beam and an optical long trace profiler. In particular, much attention has been given to the determination of the angle between the two sections of the Wolter I optical configuration and to the effect of the mandrel mounting supports. The PSD was completed with the low-frequency results. Finally, the surface data from the earlier experiment on the Ni-coated normally-polished paraboloid and the superpolished hyperboloid were used to predict the image quality of a Wolter I type optics having the same surface characteristics. The influence of different surface finishes on the image point spread function of a grazing incidence mirror is discussed.
de Chambure Daniel
Freund Andreas K.
Gondoin Philippe
Gougeon Samuel
Hignette Olivier
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