Physics
Scientific paper
Jul 1997
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1997spie.3113..260h&link_type=abstract
Proc. SPIE Vol. 3113, p. 260-266, Grazing Incidence and Multilayer X-Ray Optical Systems, Richard B. Hoover; Arthur B. Walker; E
Physics
Scientific paper
The influence of varying the Ar-pressure in the process of depositing Ni/C multilayers by dc-magnetron sputtering has been studied, and atomic force microscopy (AFM) measurements, x-ray characterization results and transmission electron microscopy (TEM) results are presented. Single Ni and C films and Ni/C multilayers were deposited at Ar-pressures of 1.5, 3, 5 and 7 mTorr. The one-dimensional power spectral density data from the AFM measurements clearly indicate that the best densities and thin film qualities for both materials are obtained at lower Ar-pressure, i.e. 1.5 mTorr.
Bruni Ricardo J.
Clark Anna M.
Everett John
Fedyunin Y.
Gorenstein Paul
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