Strain sensing with sub-micron sized Al-AlOx-Al tunnel junctions

Details Strain sensing with sub-micron sized Al-AlOx-Al tunnel junctions Strain sensing with sub-micron sized Al-AlOx-Al tunnel junctions

2009-06-23

arxiv.org/abs/0906.4234v1

Physics

Condensed Matter

Mesoscale and Nanoscale Physics

4 pages, 3 figures

Scientific paper

We demonstrate a local strain sensing method for nanostructures based on metallic Al tunnel junctions with AlOx barriers. The junctions were fabricated on top of a thin silicon nitride membrane, which was actuated with an AFM tip attached to a stiff cantilever. A large relative change in the tunneling resistance in response to the applied strain (gauge factor) was observed, up to a value 37. This facilitates local static strain variation measurements down to ~10^{-7}.

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