Physics – Condensed Matter – Mesoscale and Nanoscale Physics
Scientific paper
2009-04-23
Nature Physics (2011), merged with arXiv:1001.3170, Piezoresistive heat engine and refrigerator
Physics
Condensed Matter
Mesoscale and Nanoscale Physics
Scientific paper
10.1038/NPHYS1871
There is a large interest to decrease the size of mechanical oscillators since this can lead to miniaturization of timing and frequency referencing devices, but also because of the potential of small mechanical oscillators as extremely sensitive sensors. Here we show that a single crystal silicon resonator structure spontaneously starts to oscillate when driven by a constant direct current (DC). The mechanical oscillation is sustained by an electrothermomechanical feedback effect in a nanobeam, which operates as a mechanical displacement amplifier. The displacement of the resonator mass is amplified, because it modulates the resistive heating power in the nanobeam via the piezoresistive effect, which results in a temperature variation that causes a thermal expansion feedback-force from the nanobeam on the resonator mass. This self-amplification effect can occur in almost any conducting material, but is particularly effective when the current density and mechanical stress are concentrated in beams of nano-scale dimensions.
Goossens Martijn J.
Koops Gerhard E. J.
Phan Kim L.
Steeneken Peter G.
van Beek Joost T. M.
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