Solution of the nonstationary diffusion equation for interstitial impurity atoms by the method of Green functions

Details Solution of the nonstationary diffusion equation for interstitial impurity atoms by the method of Green functions Solution of the nonstationary diffusion equation for interstitial impurity atoms by the method of Green functions

2008-09-05

arxiv.org/abs/0809.1113v1

Physics

Condensed Matter

Materials Science

30 pages, 5 figures, in Russian

Scientific paper

On the basis of the Green function method, analytical solutions of the diffusion equation which describes nonstationary migration of nonequilibrium interstitial impurity atoms have been derived. It is supposed that the initial distribution of nonequilibrium impurity interstitials is formed due to ion implantation and, therefore, is described by the Gaussian function. The condition of the constant concentration of impurity interstitials (the Dirichlet boundary condition) or reflecting boundary condition was imposed on the surface of a semiconductor. The Dirichlet boundary condition was also enforced for the concentration of impurity interstitials in the infinity, i.e., in the bulk of a semiconductor. On the basis of the solutions derived the redistribution of ion-implanted boron in silicon substrate during low-temperature thermal treatment has been simulated. The calculated profile of boron atoms after annealing agrees well with experimental data. It means that the analytical solutions derived can be used both for verifying the numerical results and for modeling the long-range migration of nonequilibrium impurity interstitials during low-temperature thermal treatments.

Affiliated with

Also associated with

No associations

Rating

Solution of the nonstationary diffusion equation for interstitial impurity atoms by the method of Green functions does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Solution of the nonstationary diffusion equation for interstitial impurity atoms by the method of Green functions, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Solution of the nonstationary diffusion equation for interstitial impurity atoms by the method of Green functions will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-4852