Simulation of ion-implanted boron redistribution under different conditions of the transient enhanced diffusion suppression

Details Simulation of ion-implanted boron redistribution under different conditions of the transient enhanced diffusion suppression Simulation of ion-implanted boron redistribution under different conditions of the transient enhanced diffusion suppression

2011-06-23

arxiv.org/abs/1106.4845v1

Physics

Condensed Matter

Materials Science

3 pages, 3 figures

Scientific paper

It has been shown by means of impurity diffusion simulation that ion-implanted boron redistribution at the annealing temperatures 800^{\circ}C and lower is governed by the long-range migration of nonequilibrium impurity interstitials regardless of the methods used for the transient enhanced diffusion suppression. The relative amounts of impurity atoms, which are being transferred to the transient interstitial position, have been determined and time-average migration lengths of nonequilibrium boron interstitials have been obtained.

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