Physics – Optics
Scientific paper
Aug 2005
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2005spie.5900...59h&link_type=abstract
Optics for EUV, X-Ray, and Gamma-Ray Astronomy II. Edited by Citterio, Oberto; O'Dell, Stephen L. Proceedings of the SPIE, Volum
Physics
Optics
Scientific paper
Reflection gratings offer high dispersion and thus the potential for high spectral resolution in the soft x-ray band. The requirements of high efficiency and maximum collecting area at minimum mass lead to the desire for densely stacked and exquisitely flat thin-foil grating substrates. In the past we have successfully addressed the problems of thin substrate figure metrology and blazed grating profile fabrication. Our recently developed low-stress thin-foil metrology truss with 50 nm figure repeatability removed a metrology bottleneck and allows us to make progress in the shaping of thin-foil substrates. We present results on the figuring of 100 mm-diameter silicon wafers via magnetorheological finishing to a flatness below 100 nm peak-to-valley, allowing for sub-arcsecond reflection optics.
Akilian Mireille
Chang Chi-Hao
Cleaveland Ed
Hallock Robert
Heilmann Ralf K.
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