Physics – Condensed Matter – Materials Science
Scientific paper
2006-08-30
Physics
Condensed Matter
Materials Science
presented 26.July 2006 at ICPS 2006 Vienna
Scientific paper
10.1063/1.2729783
The epitaxial growth conditions for silicon on germanium substrates were investigated as a function of growth temperature and monolayer coverage. Island formation was observed for the hole studied temperature range, although strong alloying with the substrate occurred for the highest temperatures. Carbon pre-deposition offers suitable nucleation centers for the Si island and reduction of alloying. pre-structured Ge substrates were prepared to enhance islanding and to achieve ordering.
Pachinger Dietmar
Schaeffler Lichtenberger und H. F.
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