Physics – Condensed Matter – Materials Science
Scientific paper
2009-09-25
Phys. Rev. B 84, 054113 (2011)
Physics
Condensed Matter
Materials Science
5 pages, 5 figures
Scientific paper
10.1103/PhysRevB.84.054113
Coherent x-ray diffractive imaging is extended to high resolution strain analysis in crystalline nanostructured devices. The application potential is demonstrated by determining the strain distribution in (Ga,Mn)As/GaAs nanowires. By separating diffraction signals in reciprocal spaces, individual parts of the device could be reconstructed independently by our inversion procedure. We demonstrate the method to be effective for material specific reconstruction of strain distribution in highly integrated devices.
Baumbach Tilo
Fohtung E.
Grigoriev Dima
Holy V.
Irvine Andrew C.
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