Physics – Condensed Matter – Materials Science
Scientific paper
2009-04-15
Physics
Condensed Matter
Materials Science
10 pages, 6 figures
Scientific paper
Nanoscale lithography on SrRuO3 (SRO) thin film surfaces has been performed by scanning tunneling microscopy under ambient conditions. The depth of etched lines increases with increasing bias voltage but it does not change significantly by increasing the tunneling current. The dependence of line width on bias voltage from experimental data is in agreement with theoretical calculation based on field-induced evaporation. Moreover, a three-square nanostructure was successfully created, showing the capability of fabricating nanodevices in SRO thin films.
Liu Yun
Zhang Jia
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