Quantitative topographic imaging using a near-field scanning microwave microscope

Physics – Condensed Matter – Materials Science

Scientific paper

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Accepted for publication Applied Physics Letters. To appear tentatively 4/6/98

Scientific paper

10.1063/1.121182

We describe a technique for extracting topographic information using a scanning near-field microwave microscope. By monitoring the shift of the system's resonant frequency, we obtain quantitative topographic images of uniformly conducting metal surfaces. At a frequency of 9.572 GHz, our technique allows for a height discrimination of about 55 nm at a separation of 30 microns. We present topographic images of uneven, conducting samples and compare the height response and sensitivity of the system with theoretical expectations.

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