Quantitative chemical mapping at the atomic scale

Details Quantitative chemical mapping at the atomic scale Quantitative chemical mapping at the atomic scale

2011-10-23

arxiv.org/abs/1110.5018v1

Physics

Condensed Matter

Materials Science

Scientific paper

Atomic-scale mapping of the chemical elements in materials is now possible using aberration-corrected electron microscopes but delocalization and multiple scattering can confound image interpretation. Here we report atomic-resolution measurements with the elastic and inelastic signals acquired on an absolute scale. By including dynamical scattering in both the elastic and inelastic channels we obtain quantitative agreement between theory and experiment. Our results enable a close scrutiny of the inelastic scattering physics and demonstrate the possibility of element-specific atom counting.

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