Physics – Condensed Matter – Materials Science
Scientific paper
2002-02-19
Physics
Condensed Matter
Materials Science
15 pages, 3 figures
Scientific paper
The formation of hafnium silicate films (HfSixOy) for use as gate oxides with large dielectric constant by solid state reaction of Hf metal and SiO2 was investigated. Thin, fully reacted silicate films could be formed, and were thermally stable in vacuum to temperatures in excess of 800 C. The interface between a hafnium silicate layer and the silicon substrate was shown to be stable against SiO2 formation. The results suggest a new processing route for production of a gate insulator having low equivalent oxide thickness.
Brinck A. V.
Johnson-Steigelman H. T.
Lyman P. F.
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