Possibilities of application of elastic mid-IR light scattering for inspection of internal gettering operations

Details Possibilities of application of elastic mid-IR light scattering for inspection of internal gettering operations Possibilities of application of elastic mid-IR light scattering for inspection of internal gettering operations

2010-08-26

arxiv.org/abs/1008.4534v2

Inst. Phys. Conf. Ser. 149 (1996) 343-348

Physics

Condensed Matter

Materials Science

DRIP-VI; unlikely to be available elsewhere

Scientific paper

A method of low-angle mid-IR light scattering is shown to be applicable for
the contactless and non-destructive inspection of the internal gettering
process in CZ Si crystals. A classifcation of scattering inhomogeneities in
initial crystals and crystals subjected to the getting process is presented.

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