Physics – Condensed Matter – Materials Science
Scientific paper
2003-11-21
Semiconductor Science and Technology 19, L13-16 (2004)
Physics
Condensed Matter
Materials Science
7 pages, 3 figures
Scientific paper
10.1088/0268-1242/19/3/L02
Cubic (zinc-blende) Ga1-xMnxN layers were grown by plasma-assisted molecular beam epitaxy on GaAs (001) substrates. Some of the structures also contained cubic AlN buffer layers. Auger Electron Spectroscopy and Secondary Ion Mass Spectroscopy studies clearly confirmed the incorporation of Mn into cubic GaN, the Mn being uniformly distributed through the layer. X-ray diffraction studies demonstrated that the Mn-doped GaN films are cubic and do not show phase separation up to a Mn concentrations of x<0.1. P-type conductivity for the cubic Ga1-xMnxN layers was observed for a wide range of the Mn doping levels. The measured hole concentration at room temperature depends non-linearly on the Mn incorporation and varies from 3x10^16 to 5x10^18 cm-3.
Campion R. P.
Edmonds K. W.
Foxon C. T.
Gallagher B. L.
Giddings A. D.
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