Physics
Scientific paper
Sep 1992
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1992spie.1685..305k&link_type=abstract
Proc. SPIE Vol. 1685, p. 305-316, Infrared Detectors and Focal Plane Arrays II, Eustace L. Dereniak; Robert E. Sampson; Eds.
Physics
1
Scientific paper
A new approach to the fabrication of monolithic infrared focal plane arrays is presented and examined in this paper. The array is based on photovoltaic diodes, parallel integration capacitors, and MIS field effect transistors (FET). The photodiode is connected directly to the integrating capacitor while the MISFET serves as a pass gate to the video line. This configuration is operated in the pseudo-staring mode. The array was implemented in InSb, in a process based on a new passivation in which a photo chemical oxidation of InSb is followed by a conventional photo chemical SiO(subscript 2) growth. A two-level metallization process was developed serving both for electrical connection and optical coverage. Two configurations were tested for the layout of the two metal layers. In addition, the lower metallization was implemented in Cr, Ti, and Al. The optimal structure is a planar array with Cr as the first metal layer which forms the source and drain contacts.
Kepten Avishai
Schacham Samuel E.
Shacham-Diamand Yosef Y.
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