Optimization of reflectivity of periodic and quasiperiodic multilayer films at soft X-ray wavelengths

Physics – Optics

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Bandwidth, Reflectance, Thin Films, X Rays, Carbon, Gold, Maxwell Equation, Refractivity, Snells Law

Scientific paper

The reflectivity of multilayer films consisting of alternating layers of high and low refractive index is investigated. It is found that the thickness of periods affects the optimized reflectivity, and that a quasi-periodic structure with fixed thickness of periods but changing thicknesses of the layers can form two reflecting peaks at different wavelength positions. The result can be used to increase the bandwidth and to change the shape of reflectivity curves in the soft X-ray region. Since nonabsorbing material does not exist in the soft X-ray region, the thickness of each layer should be optimized separately in order to obtain maximum reflectivity at a single wavelength.

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