Absolute testing of flatness standards at square-grid points

Details Absolute testing of flatness standards at square-grid points Absolute testing of flatness standards at square-grid points

Jun 1990

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1990optco..77..107g&link_type=abstract

Optics Communications, Volume 77, Issue 2-3, p. 107-112.

Physics

Optics

14

Scientific paper

For the absolute interferometric testing of three unknown plane surfaces A, B, C, the surfaces can be combined in pairs in different positions. For such positional combinations a new rotation shift method is described. In addition to the three basic positions AB, BC, CA, this method uses one or two further positions that are reached by a 90° rotation and a parallel shift of one surface from the respective basic position. This makes it possible to determine the absolute flatness deviations of the three surfaces at the modes Qij of a square grid whose grid spacing is equal to the shifting distance. In comparison with known methods, this has the advantage that, if image detectors of a square grid structure are used, it does not require any interpolations between the detector elements and the points Qij. The basic equations and a method for their error-adjusted solution are stated. The solution is shown to be unique.

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