Optimisation and Simulation of an Alternative nano-flash Memory: the SASEM device

Details Optimisation and Simulation of an Alternative nano-flash Memory: the SASEM device Optimisation and Simulation of an Alternative nano-flash Memory: the SASEM device

2011-09-13

arxiv.org/abs/1109.2927v1

Physics

Condensed Matter

Materials Science

Materials Research Society Fall Meeting, Boston : United States (2004)

Scientific paper

Process simulation are performed in order to simulate the full fabrication
process of an alternative nano-flash memory in order to optimise it and to
improve the understanding of the dot storage formation. The influence of
various parameters (oxidation temperature, nanowire shape) have been
investigated.

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