On the Casimir effect in the microelectromechanical systems MEMS

Details On the Casimir effect in the microelectromechanical systems MEMS On the Casimir effect in the microelectromechanical systems MEMS

2005-06-09

arxiv.org/abs/cond-mat/0506226v1

Physics

Condensed Matter

Other Condensed Matter

10 pages, 7 figures

Scientific paper

In this paper the thermal transport phenomena in MEMS are investigated. The
thermal Klein-Gordon transport equation for nanoscale structures is formulated
and solved.
Key words: MEMS, Klein-Gordon equation, Casimir effect.

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