Nanostructure and microstructure of laser-interference induced dynamic patterning of Co on Si

Details Nanostructure and microstructure of laser-interference induced dynamic patterning of Co on Si Nanostructure and microstructure of laser-interference induced dynamic patterning of Co on Si

2006-09-07

arxiv.org/abs/cond-mat/0609153v2

J. Phys. D: Appl. Phys. 39 (2006) 5149\^a?"5159

Physics

Condensed Matter

Materials Science

Submitted to J. Phys. D: Appl. Phys

Scientific paper

10.1088/0022-3727/39/24/009

We have investigated the nanostructure and microstructure resulting from ns laser irradiation simultaneous with deposition of Co films on Si(001) substrates. The spatial order and length scales of the resulting nanopatterns and their crystalline microstructure were investigated as a function of film thickness h and laser energy density E using a combination of atomic force, scanning electron and transmission electron microscopies. The results could be classified into two distinct categories based on the laser energy density used. It was observed that the thickness-dependent E required to melt the Co film (E_{Co}) was lower than Si (E_{Si}) primarily because of the higher reflectivity of Si. Consequently, for energy densities E_{Co}

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