Nanomechanical resonators operating as charge detectors in the nonlinear regime

Physics – Condensed Matter – Mesoscale and Nanoscale Physics

Scientific paper

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8 pages, 6 figures

Scientific paper

10.1209/epl/i2000-00241-3

We present measurements on nanomechanical resonators machined from Silicon-on-Insulator substrates. The resonators are designed as freely suspended Au/Si beams of lengths on the order of 1 - 4 um and a thickness of 200 nm. The beams are driven into nonlinear response by an applied modulation at radio frequencies and a magnetic field in plane. The strong hysteresis of the magnetomotive response allows sensitive charge detection by varying the electrostatic potential of a gate electrode.

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